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JETP, Vol. 33, No. 4, p. 753 (October 1971)
(Russian original - ZhETF, Vol. 60, No. 4, p. 1393, October 1971 )

Mechanism of Formation of the Ion Component in Cathode Sputtering of Metals
V.I. Veksler, B.A. Tsipinyuk

Received: September 18, 1970

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